IMIC Specialty
Conferences
From time to time, the IMIC organization may hold a "Specialty Conference"
on a subtopic of VLSI Multilevel Interconnection (ie, dielectrics,
conductors, planarization, reliability, simulation & modeling, etc.).
These "Specialty Conferences" are held in addition to the annual VMIC
meeting, normally held in September. "Specialty Conferences" allow an
in-depth
look and evaluation of various VMIC sub-areas.
Conference/Shortcourse
Registration Information - and the Registration Card
Industrial Exhibits
HIGHLIGHTS:
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- "Future Fluorocarbon CVD Low k Dielectric Thin Films"
Dr. Karen K. Gleason, M.I.T.
DUMIC Keynote Address
- "Unity-k Gas Dielectrics for ULSI Interconnects"
Dr. Thomas E. Wade, U.S.F.
DUMIC Luncheon
- "Semiconductor Industry Low k Directions"
Dr. Max Biberger, Novellus
Dielectrics Short Course Luncheon
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- "Shallow Trench Isolation CMP Processes"
Dr. Peter Burk, Rodel
CMP Short Course Dinner
- "300mm/Copper/Low k Convergence: Timing, Trends
and Issues"
Dr. Robert N. Castellano
The Information Network
CMP-MIC Keynote Address
- "Growth of the Business and Science Infrastructure
for CMP",
Dr. Kathleen Perry, Obsidian
CMP-MIC Luncheon
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