“New Paradigms in Patterning & Process
Development to Extend
Moore’s Law”
Kenneth MacWilliams; VP
Applied Materials
Keynote Address - 1
“Recent Challenges & Solutions for Demanding
IC Interconnect Performance”
Axel Preusse; AMD
Fellow,
Dresden, Germany
Keynote Address 2
“Interconnect Scaling Challenges Beyond the
22 nm Node”
Sridhar Balakrishnan;
Intel Corp.
Keynote Address - 3
“Optimized
Curing and CMP of Nanostructured
Ultra-Low-k Films”
Reinhold Dauskardt;
Stanford
University
VMIC Awards Luncheon
(Thursday @ Noon)
“Impact of Interconnect Variations on Design”
Nagaraj
NS;
Texas Instruments
State-of-the-Art Seminar Luncheon
3-D IC Keynote Panel:
“3D IC Realization & Integration
For the 22 nm Technology Node
& Beyond”
J. Jay McMahon, SEMATECH –
Moderator
Steve Koester, IBM
Jerry Bautista, INTEL
Robert Patti, TEZZARON SEMI
David
Mountain, EXCEPTIONAL COMPUTING
Peter Ramm, FRAUNHOFER
Shinobu Fujita, TOSHIBA
Two Sessions on 3-D IC’s and
Two Sessions
on CMP Processing, and
An
Evening Panel Session on
‘25 Years of Interconnect’
Ron Gutmann, RPI - Moderator