2008 CMP-MIC Conference

Welcome to the Year 2008 IMIC Specialty Conferences

IMIC Specialty Conference

From time to time, the IMIC organization may hold a "Specialty Conference" on a subtopic of VLSI Multilevel Interconnection (i.e., dielectrics, conductors, planarization, reliability, simulation & modeling, etc.). These "Specialty Conferences" are held in addition to the annual VMIC meeting, normally held in September. "Specialty Conferences" allow an in-depth look and evaluation of various VMIC sub-areas.

Marriott Hotel
Fremont, California
46100 Landing Parkway
March 3 - 6, 2008
Hotel Registration CMP PLANARIZATION
(Thirteenth International Conference)
FOR ULSI MULTILEVEL
INTERCONNECTION
March 4 - 6, 2008 STATE-OF-THE-ART
SHORT COURSE
CMP Planarization
March 3, 2008

2008 CMP-MIC Executive/Program Committee
Registration Information	Registration Form

http://www.imic.org

2008 CMP-MIC HIGHLIGHTS
HIGHLIGHTS: Keynote Address: “IS THERE A FUTURE FOR CMP?” Dr. Ken Cadien, Emeritus Intel Fellow Professor & Canada Research Chair in Nanofabriation University of Alberta, Canada Keynote Panel 1: “CMP’S DIRECTION AND NEEDS” Mark Buehler, Intel Paul Feeney, Cabot Microelectronics Pete Beckage, Spansion Ben Bonner, Novellus Keynote Panel 2: “CMP OF LOW-k DIELECTRICS” Satyavolu Papa Rao, IBM Reinhold Dauskardt, Stanford Univ. Samuel Gall, CEA-LETI-MINATEC Hugh Li, Rohm & Haas Madhukar Rao, Air Products & Chem. Keynote Panel 3: “EMERGING CMP APPLICATIONS” Frank Mauersberger, AMD Jeffrey Dysard, Cabot Tom Stephenson, Scottish Microelectronics Ctr. Robert Rhoades, Entrepix Jan Vaes, IMEC CMP-MIC Awards Lunch: “The Growing Semiconductor Industry in CHINA: Challenges & Opportunities” Dr. Chenting Lin ECI Technology Short Course Luncheon “NEW ECONOMICS AND OPPORTUNITIES FOR DEEP SUB – 45 nm HALF-PITCH BEOL” Dr. David Hansen UNITY SEMICONDUCTOR

2008 CMP-MIC
HIGHLIGHTS

HIGHLIGHTS:

Keynote Address:
“IS THERE A FUTURE FOR CMP?”
Dr. Ken Cadien, Emeritus Intel Fellow
Professor & Canada Research Chair in Nanofabriation
University of Alberta, Canada

Keynote Panel 1:
“CMP’S DIRECTION AND NEEDS”
Mark Buehler, Intel
Paul Feeney, Cabot Microelectronics
Pete Beckage, Spansion
Ben Bonner, Novellus

Keynote Panel 2:
“CMP OF LOW-k DIELECTRICS”
Satyavolu Papa Rao, IBM
Reinhold Dauskardt, Stanford Univ.
Samuel Gall, CEA-LETI-MINATEC
Hugh Li, Rohm & Haas
Madhukar Rao, Air Products & Chem.

Keynote Panel 3:
“EMERGING CMP APPLICATIONS”
Frank Mauersberger, AMD
Jeffrey Dysard, Cabot
Tom Stephenson, Scottish Microelectronics Ctr.
Robert Rhoades, Entrepix
Jan Vaes, IMEC

CMP-MIC Awards Lunch:
“The Growing Semiconductor Industry in CHINA:
Challenges & Opportunities”
Dr. Chenting Lin
ECI Technology

Short Course Luncheon
“NEW ECONOMICS AND
OPPORTUNITIES FOR DEEP
SUB – 45 nm HALF-PITCH BEOL”
Dr. David Hansen
UNITY SEMICONDUCTOR