CALL FOR PAPERS

TWELFTH INTERNATIONAL

CONFERENCE

ON

CHEMICAL-MECHANICAL POLISH (CMP)

PLANARIZATION

FOR ULSI MULTILEVEL INTERCONNECTION (CMP-MIC)

MARCH 5 - 8, 2007

FREMONT

MARRIOTT

FREMONT, CALIFORNIA

CMP-MIC CONFERENCE OBJECTIVES

To assemble researchers and technical support personnel from Industry, Universities and Government Laboratories from around the globe to address all current and future issues related to CHEMICAL- MECHANICAL POLISH PLANARIZATION as applied to on-chip ULSI Multilevel Interconnection applications. 

TOPICAL AREAS

            DEVELOPMENTS IN DIELECTRIC & METAL CMP PROCESSES & CONTROL
            CMP IN-SITU PROCESSING & MONITORING
            ELECTRO-CMP PROCESS DEVELOPMENTS
            CMP PROCESS INTEGRATION FOR DIELECTRICS & METALS
            CONTAMINATION AND (PRE & POST) CLEANING ISSUES
            CMP CONSUMABLE DEVELOPMENTS (PADS/SLURRIES/ETC.)
            EQUIPMENT AND MANUFACTURING ISSUES & MODELING
            METROLOGY, CHARACTERIZATION, TEST;  MODELING AND SIMULATIONS
            CMP STANDARDS DEVELOPMENTS, NEW TECHNOLOGIES & PATENT INFO
            ALTERNATIVE GLOBAL PLANARIZATION TECHNIQUES AS COMPARED TO CMP

ABSTRACT SUBMISSION - FOR REGULAR PAPER & POSTER PAPER

A 400 - 500 word abstract with supporting tables/graphs/photos which clearly describes the nature, scope, content, organization and key points of the proposed paper are required for paper selection and session assignment.  The title, name and affiliation of authors, complete with return address, telephone and fax  number of principal contact should appear on the first page and the paper title and author's name on each subsequent page.  Mail, E-mail or fax a copy of the abstract to be received by December 15, 2006. Authors will be notified of paper acceptance with instructions for publications by Dec. 30, 2006.  Manuscripts are due in final form for publication in the Official CMP-MIC Conference Proceedings by Jan. 14, 2007.  All Manuscript must be submitted by this deadline date to meet schedule.  Please obtain clearances prior to sending abstract.