VLSI MULTILEVEL INTERCONNECTION
STATE-OF-THE-ART
SEMINAR
Monday, September 25, 2006
This year’s state-of-the-art SEMINAR will address those
issues associated with current fundamental developments in advancing
VLSI/ULSI multilevel interconnection towards greater functionality,
density and speed. It will include a review and discussion of those
primary topical areas which impact today's multilevel interconnection
event as well as project future direction for this critical industry. A
distinguished set of lecturers will participate in this SEMINAR, which is
a MUST for all engineers, managers and technicians working on VLSI/ULSI
multilevel interconnection. The registration fee includes coffee breaks,
luncheon and a visuals booklet. THIS COURSE HAS LIMITED ENROLLMENT. YOU
ARE ENCOURAGED TO ADVANCE REGISTER EARLY.
TOPICAL COVERAGE
I. INTRODUCTORY REMARKS
- 9:00 A.M.
Dr. Thomas E. Wade
Seminar Chairman
University of South Florida
II.
CONDUCTORS:
ADVANCED ALUMINUM VIA FILL METHODS
Dr. Jens
Hahn - 9:15
A.M.
Qimonda
Dresden, Germany
Coffee
Break - 10:00 A.M.
III.
DIELECTRICS:
LOW-k & ULTRA LOW-k
DIELECTRICMATERIALS - 10:15 A.M.
Dr. Willi
Volksen
IBM Almaden Research Center
San Jose,
California
IV.
C. M. P.:
RECENT DEVELOPMENTS IN CMP
AND eCMP - 11:00 A.M.
Dr. Yuzhuo Li
Clarkson
University
Potsdam, New
York
Seminar Luncheon - 12:00 P.M.
“Compact, Fast Light Modulators for Intra
Chip Optical Interconnections.”
Dr. John F. McDonald
RENSSELAER POLYTECHNIC INST
Troy, New York
V.
3-D INTEGRATED CIRCUITS:
WAFER-LEVEL 3-D IC’s:
TECHNOLOGY
PLATFORMS & APPLICATIONS - 1:15 P.M.
Drs. Ronald Gutmann & James Lu
Rensselaer
Polytechnic Institute
Troy, New York
VI. RELIABILITY:
RELIABILITY ISSUES IN
ADVANCED
COPPER / LOW-k
SYSTEMS - 2:00 P.M.
Dr. Hazara
Rathore
IBM
Microelectronics
Hopewell
Junction, New York
Coffee Break - 2:45 P.M.
VII.
PHOTONICS:
CMOS PHOTONICS TECHNOLOGY
&
APPLICATIONS - 3:00
P.M.
Dr. Cary
Gunn
Luxtera
Corp
Carlsbad,
California
VIII.
DESIGN FOR
MANUFACTURING:
DFM / DFY TECHNOLOGIES FOR NANO-
SCALE I.C. PRODUCTION - 3:45 P.M.
Dr. Nitin Deo
Ponte’ Solutions, Inc.
Mountain View,
California
IX.
CLOSING REMARKS
- 4:30 P.M.
Short Course registration
materials may be picked up at the Registration Desk from 7 - 10 A.M. on
Monday, September 25, 2006. Additional at-door registrations will be
conducted during this time as well.
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