Chemical - Mechanical

PLANARIZATION

FOR ULSI MULTILEVEL INTERCONNECTION

- SHORT COURSE -

 

Monday, February 20, 2006

 

    This year’s comprehensive Chemical Mechanical Planarization Short Course  consist of a FULL DAYS ACTIVITIES and will address those issues associated with current fundamental developments in advancing ULSI multilevel interconnection towards greater functionality, density and speed.  It will include a review and discussion of those CMP primary topical areas which impact todays multilevel interconnection activities as well as project future direction for this critical industry.  A distinguished set of lecturers will participate in this CMP SHORT COURSE, which is a MUST for all engineers, managers and technicians working on VLSI/ULSI multilevel interconnection.  The registration fee includes coffee breaks, luncheon and a visuals booklet.  YOU ARE HIGHLY ENCOURAGED TO ADVANCE REGISTER EARLY TO GUARANTEE YOUR SEAT AT THIS SHORT COURSE.

 

 

TOPICAL COVERAGE

 

                                  I.  INTRODUCTORY REMARKS  -  9:00 A.M. 

                                              Dr. Thomas E. Wade
                                                  Short Course Chairman

                                                  University of South Florida
                                                  Tampa, Florida

 

                                 II.  INNOVATIVE APPROACHES IN METAL

                              CMP SLURRY DEVELOPMENT  -  9:15 A.M. 

                                                   Dr. Yuzhuo Li

                                                   Clarkson University

                                                   Potsdam, New York

 

                              Coffee Break  -  10:00 A.M.   

 

 

                            III.  INTEGRATED MODELING OF CMP                           

                                    FOR SUB-MICRON I.C.’s  -  10:15 A.M.

 

                                                   Dr. David Dornfeld                   

                                                   University of California

                                                   Berkeley, California

 

                                 IV.  NOVEL APPLICATION IN CMP  -  11:00 A.M.

                                                   Dr. Martin Kulawski

                                                   VTT Microelectronics

                                                    Espoo, Finland  

 

                               Short Course Luncheon  -  12:00 PM

     “MetaTrends for the Materials and CMP Markets”

                               Dr. Karey Holland

                               Techcet, LLC

                               Genoa,  Nevada

 

              V. CMP TRIBOLOGICAL ATTRIBUTES  -  1:45 P.M                                  

                                                    Dr. Ara Philipossian

                                                    University of Arizona

                                                    Tucson, Arizona

 

                                   VI.  IN-SITU CMP PROCESSES  -  2:30 P.M.

                                                    Drs. James Vlahakis

                                                    & Caprice Gray

                                                    Tufts University

                                                    Medford, Massachusetts

 

                                             Coffee Break  -  3:15 P.M.

 

                        VII. COPPER ELECTROCHEMICAL

                           PLANARIZATION PROCESSES  -  3:30 P.M.

                                                     Dr. Jinshan Huo

                                                    American AirLiquide

                                                    Countryside, IL
 

 

                                   VIII.   POST-CLEANING METHODS FOR CMP  -  4:15 PM                   

                                                Dr. Cuong Tran

                                                ATMI

                                                Allentown, Pennsylvania
 

 

                          IX.    CLOSING REMARKS  -  5:00 P.M.

 

             Short Course registration materials may be picked up at the Registration Desk

       from 7 – 10 A.M. on Monday, February 20, 2006.

 Additional at-door registrations will be conducted during this time as well.