VLSI MULTILEVEL INTERCONNECTION

STATE-OF-THE-ART
SEMINAR

Monday, October 3, 2005

This year’s state-of-the-art SEMINAR will address those issues associated with current fundamental developments in advancing VLSI/ULSI multilevel interconnection towards greater functionality, density and speed. It will include a review and discussion of those primary topical areas which impact today's multilevel interconnection event as well as project future direction for this critical industry. A distinguished set of lecturers will participate in this SEMINAR, which is a MUST for all engineers, managers and technicians working on VLSI/ULSI multilevel interconnection. The registration fee includes coffee breaks, luncheon and a visuals booklet. THIS COURSE HAS LIMITED ENROLLMENT. YOU ARE ENCOURAGED TO ADVANCE REGISTER EARLY.

TOPICAL COVERAGE

I. INTRODUCTORY REMARKS 9:00 A.M.
Dr. Thomas E. Wade
Seminar Chairman
University of South Florida

II. DIELECTRICS:

LOW-k & ULTRA LOW-k POROUS
DIELECTRICS 9:15 A.M.
Dr. Willi Volksen
IBM Almaden Research Center
San Jose, California

Coffee Break 10:00 A.M.

III. C. M. P.:

RECENT DEVELOPMENTS
IN CMP 10:15 A.M.
Dr. Ara Philipossian
University of Arizona
Tucson, Arizona

IV. SCALING:

SIZE EFFECTS IN INTERCONNECT 11:00 A.M.
RESISTIVITY
Dr. Guenther Schindler
Infineon Technology
Munich, Germany
 

V. DESIGN FOR MANUFACTURING:

DFM / DFY TECHNOLOGIES FOR NANO-
SCALE I.C. PRODUCTION 1:15 P.M.
Dr. Nitin Deo
Ponte’ Solutions, Inc.
Mountain View, California

VI. 3-D INTEGRATED CIRCUITS:

3-D ARCHITECTURE AND THE ROLE
OF INTERCONNECTS 2:00 P.M.
Drs. Chris Liu & Sandip Tiwari
Cornell University
Ithaca, New York

Coffee Break 2:45 P.M.

VII. RELIABILITY:

RELIABILITY ISSUES IN ADVANCED
COPPER / LOW-k SYSTEMS 3:00 P.M.
Dr. Hazara Rathore
IBM Microelectronics
Hopewell Junction, New York

VIII. CHARACTERIZATION:

BEOL CHARACTERIZATION TECHNIQUES
FOR NANOMETER PROCESSES 3:45 P.M.
Dr. Laurens Kwakman
Philips Semiconductor
Crolles, France

IX. CLOSING REMARKS 4:30 P.M.

Short Course registration materials may be picked up at the Registration Desk from 7 - 10 A.M. on Monday, October 3, 2005

Additional at-door registrations will be conducted during this time as well.