Chemical - Mechanical

PLANARIZATION

FOR ULSI MULTILEVEL INTERCONNECTION

- SHORT COURSE -

Monday, February 23, 2004

This year’s comprehensive Chemical Mechanical Planarization Short Course consist of a FULL DAYS ACTIVITIES and will address those issues associated with current fundamental developments in advancing ULSI multilevel interconnection towards greater functionality, density and speed. It will include a review and discussion of those CMP primary topical areas which impact todays multilevel interconnection activities as well as project future direction for this critical industry. A distinguished set of lecturers will participate in this CMP SHORT COURSE, which is a MUST for all engineers, managers and technicians working on VLSI/ULSI multilevel interconnection. The registration fee includes coffee breaks, luncheon and a visuals booklet. YOU ARE HIGHLY ENCOURAGED TO ADVANCE REGISTER EARLY TO GUARANTEE YOUR SEAT AT THIS SHORT COURSE.

TOPICAL COVERAGE

I.INTRODUCTORY REMARKS 9:00 A.M.

Dr. Thomas E. Wade
Short Course Chairman

University of South Florida

Tampa, Florida

II. INFLUENCE OF PATTERN CHARACTERISTICS ON COPPER CMP 9:15 A.M.
Dr. Fiona M. Doyle

University of California,

Berkeley, California

Coffee Break 10:00A.M.

III. COPPER SLURRY PROGRESS 10:15 A.M.

Dr. Yuzhuo Li

Clarkson University

Potsdam, New York

IV. ELECTROCHEMICAL POLISHING PROCESS DEVELOPMENT 11:00 A.M.

Dr. Takeshi Nogami
Sony Corporation
Tokyo, JAPAN

Short Course Luncheon 12:00 P.M.

“FABRICATION OF MEMS

DEVICES FOR MEDICAL APPLICATIONS”

Dr. Shuvo Roy

Department of Biomedical Engineering

Cleveland Clinic Foundation

V. NOVEL PLANARIZATION USING CONTACT PLANARIZATION 1:45 P.M.

Dr. Jeremy McCutcheon

Brewer Science

Rolla, Missouri

VI. MULTISCALE INTEGRATED PROCESS SIMULATION 2:30 P.M.

Dr. Timothy S. Cale

Rensselaer Polytechnical Inst.

Troy, New York

Coffee Break 3:15 P.M.

VIII. MECHANICS OF CMP PADS 3:30 P.M.

Dr. Abhijit Chandra

IOWA STATE UNIVERSITY

Ames, Iowa

VII. TRIBOLOGY ISSUES IN CMP 4:15 P.M.

Dr. Norm V. Gitis

Center for Tribology

Campbell, California

VIII. CLOSING REMARKS 5:00 P.M.

Short Course registration materials may be picked up at the Registration Desk from 7 - 10 A.M. on Monday, February 23, 2004.

Additional at-door registrations will be conducted during this time as well.