From time to time, the IMIC organization may hold a "Specialty Conference"
on a subtopic of VLSI Multilevel Interconnection (i.e., dielectrics,
conductors, planarization, reliability, simulation & modeling, etc.).
These "Specialty Conferences" are held in addition to the annual VMIC
meeting, normally held in September. "Specialty Conferences" allow an
in-depth look and evaluation of various VMIC sub-areas.
February 23rd
“Copper CMP Manufacturing
Challenges for the 90 nm Node and Beyond”
“What the ITRS Does and Does
Not Say About Chemical Mechanical Planarization”
Latest CMP Technologies
including ‘ultra low pressure systems’, ‘pure organic abrasive particles’,
‘electro-chemical approaches’, ‘stress free polishing’, ‘novel split pad’,
‘abrasive free systems’ and much, much more!!
CMP - SHORT COURSE:
Full Day - 7 Expert
Lecturers
CMP-MIC Extended to
Three (3) FULL Days with over 100 technical papers to be presented.
Marina Del Rey, California
Feb. 23 - 26, 2004
Hotel Registration
(Ninth International Conference)
FOR
ULSI MULTILEVEL INTERCONNECTION
Feb. 24 - 26, 2004
SHORT COURSE
CMP Planarization
http://www.imic.org
Registration Information
Registration Form
HIGHLIGHTS
“Fabrication of MEMS Devices for Medical Applications”
Dr. Shuvo Roy,
Cleveland Clinic Foundation
CMP Short Course Luncheon
Dr. Te Hua Lin, Vice
President, Lam Research Corp.
CMP-MIC Keynote Address
Paul Feeney, Cabot
Microelectronics Corp.
CMP-MIC Luncheon
Copyright © 2005 IMIC. All rights reserved.