Chemical  - Mechanical

PLANARIZATION
FOR ULSI MULTILEVEL INTERCONNECTION
- SHORT COURSE -

 Tuesday, February 18, 2003

Registration Information Registration Form

http://www.imic.org

This year's comprehensive Chemical Mechanical Planarization Short Course consist of a FULL DAYS ACTIVITIES and will address those issues associated with current fundamental developments in advancing ULSI multilevel interconnection towards greater functionality, density and speed. It will include a review and discussion of those CMP primary topical areas which impact today's multilevel interconnection activities as well as project future direction for this critical industry. A distinguished set of lecturers will participate in this CMP SHORT COURSE, which is a MUST for all engineers, managers and technicians working on VLSI/ULSI multilevel interconnection. The registration fee includes coffee breaks, luncheon and a visuals booklet.

YOU ARE HIGHLY ENCOURAGED TO ADVANCE REGISTER EARLY TO GUARANTEE YOUR SEAT AT THIS SHORT COURSE.

I.  INTRODUCTORY REMARKS (9:00 A.M.)
 Dr. Thomas E. Wade
Short Course Chairman
University of South Florida
Tampa, Florida

 II.  ADVANCES IN CMP METAL PROCESSES (9:15 A.M.)
Dr. David Stein
Sandia National Labs
Albuquerque, New Mexico

Coffee Break (10:00 A.M.) 

IV.  SLURRY DESIGN FOR METALS AND
DIELECTRICS (Including Low-k)  (10:15 A.M.)
Dr. Rajiv Sing
University of Florida
Gainesville, Florida

IV.  COPPER SLURRY DEVELOPMENTS ( 11:00 A.M.)
Dr. Yuzhuo Li
Clarkson University
Potsdam, New York

Short Course Luncheon (12:00 P.M.)

“CURRENT AND FUTURE NEEDS OF
CHEMICAL MECHANICAL PLANARIZATION”
Paul Feeney
CABOT MICROELECTRONICS CORP.
Aurora, Illinois 

VI.  ELECTROCHEMICAL POLISHING
PROCESS DEVELOPMENT        (1:45 P.M.)
Dr. Takeshi Nogami
Sony Corporation
Tokyo, JAPAN 

VII.  CHEMICAL-MECHANICAL PLANARIZATION
INTEGRATION ISSUES (2:30 P.M.)
Dr. Katia Devriendt
IMEC
Leuven, Belgium 

Coffee Break ( 3:15 P.M.) 

V.  ADVANCES IN CHEMICAL MECHANICAL
PLANARIZATION METROLOGY (4:00 P.M.)
Dr. Jose Estabil
KLA-Tencor Corp.
San Jose, California 

IX.  C.M.P.  FUTURE NEEDS AND NEW APPLICATIONS   (4:15 P.M.)
Dr. Dale Hetherington
Sandia National Labs
Albuquerque, New Mexico 

VIII.  CLOSING REMARKS   (5:00 P.M.) 

Short Course registration materials may be picked up at the Registration Desk from 7 - 10 A.M. on Tuesday, February 18, 2003. Additional at-door registrations will be conducted during this time as well.