From time to time, the IMIC organization may hold a "Specialty Conference"
on a subtopic of VLSI Multilevel Interconnection (ie, dielectrics,
conductors, planarization, reliability, simulation & modeling, etc.).
These "Specialty Conferences" are held in addition to the annual VMIC
meeting, normally held in September. "Specialty Conferences" allow an
in-depth look and evaluation of various VMIC sub-areas.
February 18th
“Current and
Future Needs in Chemical – Mechanical Planarization”
CMP Corporate
Executives "New
and Exciting Developments in
CMP - SHORT
COURSE:
Full Day - 7
Expert Lecturers
CMP-MIC Extended to Three (3) FULL Days
Marina Del Rey, California
Feb. 18 - 21, 2003
Hotel Registration
(Eighth International Conference)
FOR
ULSI MULTILEVEL INTERCONNECTION
Feb. 19 - 21
SHORT COURSE
CMP Planarization
http://www.imic.org
Registration Information
Registration Form
Dr.
Paul Feeney, Cabot Microelectronics Corp.
CMP
Short Course Luncheon
“Progress Toward 65 nm Node, Low -k and Collaborations"
Matthew
Neville, Pres. & CEO, CABOT MICRO.
Loyal Peterman, Jr., Pres. & CEO, ABRASIVE TECH.
Richard Faubert, former Pres. & CEO, SPEEDFAM-IPEC
Dan Koharko, Exec. VP, RODEL
Mark Merrill; Chief Mkt. Exec.; KLA-TENCOR
CMP-MIC Keynote
Address
MEMS Technology - An Overview"
Dr. Dale Hetherington
SANDIA NATIONAL LABS
CMP-MIC Luncheon