This year's comprehensive Chemical Mechanical Planarization Short Course consist of a FULL DAYS ACTIVITIES and will address those issues associated with current fundamental developments in advancing ULSI multilevel interconnection towards greater functionality, density and speed. It will include a review and discussion of those CMP primary topical areas which impact todays multilevel interconnection activities as well as project future direction for this critical industry. A distinguished set of lecturers will participate in this CMP SHORT COURSE, which is a MUST for all engineers, managers and technicians working on VLSI/ULSI multilevel interconnection. The registration fee includes coffee breaks, luncheon and a visuals booklet.

YOU ARE HIGHLY ENCOURAGED TO ADVANCE REGISTER EARLY TO GUARANTEE YOUR SEAT AT THIS SHORT COURSE.

TOPICAL COVERAGE

I. INTRODUCTORY REMARKS Dr. Thomas E. Wade Short Course Chairman University of South Florida Tampa, Florida	9:00 a.m.
II. ADVANCES IN CMP METAL PROCESSES Dr. David Stein Sandia National Labs Albuquerque, New Mexico	9:15 A.M.
Coffee Break - 10:00A.M.
IV. COPPER SLURRY DEVELOPMENTS Dr. Yuzhuo Li Clarkson University Potsdam, New York	10:15 A.M.
V. APPLICATIONS OF CMP IN MAGNETIC DATA STORAGE FABRICATION Dr. Ming Jiang Seagate Technology Bloomington, Minnesota	11:00 A.M.
Short Course Luncheon 12:00 P.M. "CAN THE SEMICONDUCTOR EQUIPMENT SUPPLIERS KEEP PACE WITH THE I.T.R.S.: AN OUTLOOK INTO NEW AND INNOVATIVE TECHNOLOGIES" Dr. Maximilian A. Biberger President & COO SUPERCRITICAL SYSTEMS, INC. Gilbert, Arizona
VI. MODELING AND SIMULATION ADVANCES IN CMP PROCESSES Dr. Tamba Tugbawa Massachusetts Inst. of Technology Cambridge, Massachusetts	1:45 P.M.
VII. CHEMICAL-MECHANICAL PLANARIZATION INTEGRATION ISSUES Dr. Katia Devriendt IMEC Leuven, Belgium	2:30 P.M.
Coffee Break - 3:15 P.M.
V. ADVANCES IN CHEMICAL MECHANICAL PLANARIZATION METROLOGY Anantha Sethurama KLA-Tencor Corp. San Jose, California	4:00 P.M.
IX. C.M.P. FUTURE NEEDS AND NEW APPLICATIONS Dr. Dale Hetherington Sandia National Labs Albuquerque, New Mexico	4:15 P.M.
VIII. CLOSING REMARKS	5:00 P.M.

Short Course registration materials may be picked up at the Registration Desk from 7 - 10 A.M. on Tuesday, February 26, 2002. Additional at-door registrations will be conducted during this time as well.