Short Course Sept 02 19th VMIC

 

SHORT COURSE

VLSI MULTILEVEL INTERCONNECTION

TOWARD NANOELECTRONICS

INTERCONNECTION

Monday, November 18, 2002 

     This Short Course will address those issues impacting the future development of ULSI nanoelectronic interconnection toward greater functionality, density and speed. The registration fee includes coffee breaks, luncheon and a visuals booklet. THIS COURSE HAS LIMITED ENROLLMENT,  ADVANCE  REGISTER  EARLY.

 TOPICAL COVERAGE

I. INTRODUCTORY REMARKS                                  9:15 A.M.
        Thomas E. Wade

II. COPPER INTERCONNECT DEVELOPMENTS
     FOR  SUBMICRON METALLIZATION                   9:30 A.M.
        Max Biberger
       Supercritical Systems; Fremont, CA

                                ------------------------
                                           Coffee Break                        10:30 A.M.

 III.ADVANCES IN LOW-k & ULTRA LOW-k

 IV.DIELECTRIC SYSTEMS                                         10:45 A.M.
        Devendra Kumar
        ASM Corp.; San Jose, CA

  

 Luncheon                       12:00 P.M.

 “CMP HARDWARE TRENDS FOR

FUTURE ULSI DEVICES”

Akira Isobe

TOKYO SEIMITSU COMPANY

Tokyo, Japan

 

V.  CHEMICAL MECHANICAL PLANARIZATION:
      FRIEND OR FOE?                                                           1:45 P.M.
       David J. Stein
        Sandia National Labs; Albuquerque, NM

 

VI. ABRASIVE-FREE POLISHING & CORROSION
    CONTROL - DAMASCENE CU PROCESS                  2:45 P.M.
        Seiichi Kondo
        Selete; Ibaraki-ken, JAPAN

                                     ----------------

                                     Coffee Break                                     3:45 P.M.

 VII. ADVANCES IN R.F. PASSIVES IN COPPER/
       LOW-k INTERCONNECTS                                         4:00 P.M.
       My Doan
        Institute of Microelectronics, SINGAPORE

 VIII.   CLOSING REMARKS                                                5:00 P.M.

 

  Short Course registration materials may be picked up at the Registration Desk from 7 - 9:30 a.m. on Mon., Nov. 18, 2002.

   Additional AT-DOOR registrations -- on a space available basis -- will be conducted during this time also.