Welcome to the Year 2001 VMIC Conference

EIGHTEENTH INTERNATIONAL VLSI MULTILEVEL INTERCONNECTION CONFERENCE,
SHORT COURSES, STATE-OF-THE-ART SEMINAR AND EXHIBITION
November 27-30, 2001 at the SANTA CLARA MARRIOTT HOTEL - Santa Clara, CA.
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Marriott Hotel
Santa Clara, California
November 27-30, 2001
Hotel Registration
VMIC
(18h International Conference)
FOR ULSI MULTILEVEL INTERCONNECTION
Nov. 28-29, 2001
Seminar
Outstanding
State-of-the-Art Seminar
November
20, 2001
TWO STATE-OF-THE-ART
SHORT COURSES
Copper/Low-K
and
CMP
Nov. 27, 2001
Registration Information Registration Form
HIGHLIGHTS:
  • "On-Chip Optical Interconnect"
    Dr. Jurgen Michel;
    Microphotonics Ctr.; M.I.T.
    Keynote Address

  • "ITRS Packaging Roadmap in the Era of
    Copper/Low-k On-Chip Interconnect"
    Dr. Chi Shih Chang; Kulicke & Soffa
    VMIC Awards Luncheon

  • "The Amazing World of ADL for ULSI"
    Dr. Thomas E. Seidel; Genus Corp
    State-of-Art Seminar Luncheon

  • "Integration of Porous Low-k Dielectics in ULSI"
    Dr. Rodney Kistler; Lam Research Corp.
    Copper/Low-k & CMP Short Course Luncheon

  • Special ‘IC Packaging Trends & Challenges' Session
    Session VII

  • VMIC ‘Copper/Low-k' & ‘CMP' Short Courses,

  • Conference, plus SUPERB State-of-the-Art Seminar

  • This year's VMIC includes 125 Technical Papers.

  • OUTSTANDING PAPER & POSTER PRESENTATIONS

    The OUTSTANDING PAPER AWARD for VMIC 2000 is presented to the paper entitled " 3 D Microstructural Simulation of Thin Film Deposition for VLSI Interconnects" by T. Smy; CARLETON UNIV; Alberta, CANADA; S.K. Dew and M.J. Brett; UNIV. ALBERTA; Edmonton, CANADA.

    The OUTSTANDING POSTER PAPER AWARD for VMIC 2000 is presented to the poster paper entitled "Elimination of Junction Spiking Problems by Using Pre-Clean Etch and Two Step TiN During Contact Barrier Deposition Process" by A. Sidhwa, C. Spinner, T. Grady, S. Guisinger; ST MICROELECTRONICS; Phoenix, AZ.

    Congratulations to 2000 VMIC recipients. They will be both recognized and presented with a Certificate/Check at this years VMIC Awards Luncheon.