DIELECTRICS and CONDUCTORS FOR ULSI MULTILEVEL INTERCONNECTION

- SHORT COURSE -

Tuesday, March 6, 2001

Registration Information Registration Form

http://www.imic.org

The purpose of this SHORT COURSE is to provide an overview of current research activities for those issues impacting the on-chip DIELECTRICS and CONDUCTORS used in VLSI/ULSI multilevel interconnection and related technologies. Until a suitable dielectric material is found which can be integrated satisfactory with copper interconnect, current and future semiconductor road maps cannot be realized. A distinguished set of lecturers will participate in this DIELECTRIC & CONDUCTORS SHORT COURSE, which is a MUST for all engineers, managers and technicians working on VLSI/ULSI multilevel interconnection.

The registration fee includes coffee breaks, luncheon and a visuals booklet.

THIS COURSE HAS LIMITED ENROLLMENT. YOU ARE HIGHLY ENCOURAGED TO ADVANCE REGISTER EARLY.

TOPICAL COVERAGE


  • I. INTRODUCTORY REMARKS
    		• 9:00 A.M.
    Thomas E. Wade
    Short Course Chairman
    University of South Florida - Tampa, Florida

  • II. DEVELOPMENTS IN ORGANIC
    DIELECTRIC PROCESSES
    		• 9:15 A.M.
    Devendre Kumar
    FSI Internationa, Fremont, California

  • III. DEVELOPMENTS IN DIELECTRIC
    PROCESS SIMULATION
    		• 10:05 A.M.
    Valeriy Sukharev
    LSI Logic, Santa Clara, California

    Coffee Break 10:55 A.M.


  • IV. ADVANCES IN POROUS DIELECTRIC PROCESSES
    		• 11:10 A.M.
    Willi Volksen
    IBM Almader Research Center, San Jose, California


  • Short Course Luncheon - 12:00 P.M.

    • "ELECTROPLATING AND CMP OF COPPER INTERCONNECTS"
    Dr. Tohru Hara
    HOSEI UNIVERSITY
    Tokyo, Japan



  • VI. BARRIER/CONTACT/ADHESION LAYERS
    FOR SUBMICRON METALS
    		• 1:45 P.M.
    Max Biberger
    Supercritical Systems, Fremont, California


  • VII. ADVANCED COPPER TECHNOLOGY
    DEVELOPMENTS
    		• 2:35 P.M.
    Chiu H. Ting
    Mattson - ECD, San Jose, California
    Coffee Break 3:25 P.M.


  • VIII. RELIABILITY DEVELOPMENTS
    IN ULSI INTERCONNECTION
    		• 3:40 P.M
    Harry Rathore & Du Nguyen
    IBM Microelectronics, Hopewell Junction, New York


  • IX. CLOSING REMARKS
    		• 4:30 P.M.
    Thomas E. Wade
    University of South Florida, Tampa, Florida

    Short Course registration materials may be picked up at the Registration Desk from 7 - 10 A.M. on Tues., March 6, 2001. Additional registration - on a space available basis - will be conducted during this time as well.