This year's Chemical Mechanical Planarization Short Course consist of
a FULL DAYS ACTIVITIES and will address those issues associated with
current fundamental developments in advancing ULSI multilevel
interconnection towards greater functionality, density and speed.
It will
include a review and discussion of those CMP primary topical areas which
impact todays multilevel interconnection activities as well as project
future direction for this critical industry. A distinguished set of
lecturers will participate in this CMP SHORT COURSE, which is a MUST for
all engineers, managers and technicians working on VLSI/ULSI multilevel
interconnection.
The registration fee includes coffee breaks, luncheon
and a visuals booklet.
THIS COURSE HAS LIMITED ENROLLMENT. YOU ARE HIGHLY ENCOURAGED TO ADVANCE
REGISTER EARLY.
TOPICAL COVERAGE
- 8:35 A.M. - INTRODUCTORY REMARKS
Thomas E. Wade
Short Course Chairman
University of South Florida
Tampa, Florida
- 8:45 A.M. - ADVANCE IN CHEMICAL-MECHANICAL PLANARIZATION
CONSUMABLES
Kathleen Perry
Obsidian, Inc.
Fremont, California
- 9:30 A.M. - DEVELOPMENTS IN CMP DIELECTRIC PROCESSES
Paul Feeney
Cabot Corp.
Aurora, Illinois
-----Coffee Break 10:15 A.M------.
- 10:30 A.M. - DEVELOPMENTS IN CMP META PROCESSES
Rod Kistler
Lam Research Corp.
Fremont, California
- 11:15 A.M. - ADVANCES IN CHEMICAL MECHANICAL
PLANARIZATION METROLOGY
Jose Estabil &
Anantha Sethurama
KLA-Tencor Corp.
San Jose, California
12:00 P.M. - Short Course Luncheon
"CHEMICAL MECHANICAL POLISH: THE MONKEY ON YOUR BACK"
Dr. Karey Holland
TECHCET CORPORATION
Pheonix, Arizona
- 01:45 P.M. - MODELING AND SIMULATION ADVANCES IN CMP PROCESSES
Duane Boning
Massachusetts Inst.of Technology
Cambridge, Massachusetts
- 02:30 P.M. - CHEMICAL MECHANICAL PLANARIZATION INTEGRATION ISSUES
Katia Devriendt
IMEC
Leuven, Belgium
-------Coffee Break 3:15 P.M.---------
- 03:30 P.M.- CHEMICAL MECHANICAL PLANARIZATIO EQUIPMENT
MARKET
OVERVIEW
AND NEEDS
Michael Fury
Silterra Sdn. Bhd.
Kulim, Malaysia
- 04:15 P.M.- C.M.P. FUTURE NEEDS AND NEW APPLICATIONS
Dale Hetherington
Sandia National Labs
Albuquerque, New Mexico
- 05:00 P.M. - CLOSING REMARKS
Short Course registration materials may be picked up at the
Registration Desk from 7 - 10 A.M. on Wed., March 1, 2000.
Additional registration - on a space available basis - will be
conducted during this time as well.